Advanced technology facilities include microelectronic
fabrication facilities (fabs), nanotechnology and nanofabrication laboratories,
R&D facilities, solar panel development and manufacturing, biotechnology
and pharmaceutical plants, as well as medical and healthcare buildings.
These facilities have one thing in common: they all
house tools and processes which manufacture and inspect on sub-micron and nanometer
scales, often requiring
high end vibration criteria.
In this regime, vibration and noise are
considered contaminants which must be controlled via
good facility design.
Because of other contamination and tool requirements,
these facilities typically house far more mechanical
equipment than do traditional manufacturing operations.
For example, the cleanroom facilities commonly installed
inside these buildings consume enormous amounts of energy
in order to maintain their designed clean class.
Major rotating equipment involved in air recirculation,
exhaust, process, UPW/DI, cooling, boilers and others
generate vibrations, requiring
high-quality vibration isolation.
In some settings, materials handling systems present significant
dynamic forces to the structure. This is especially true in flat
panel display factories, where the movement of large substrates for
PDP (plasma display panels) and TFT (thin film transistor) displays
is accomplished via automated systems
(AMHS and AGV)
which generate vibrations.
Aside from facility equipment sources, such buildings
may also be impacted by
environmental ground vibration sources
and train traffic, compounded by the
dynamic characteristics of the site soil medium.
A poor soil condition may expose the facility to a higher
impact from adjacent road and rail activities and events.
Within the microelectronics industry, these facilities
often require several buildings stories tall.
Fab floors are often stacked on top of each other,
particularly in flat panel display manufacturing.
Vibration design of these highly complex facilities
requires extensive experience and understanding in the
nature of sources of vibration and noise (qualitatively and quantitatively),
often only available through field measurements, theoretical
and experimental knowledge of structural dynamics behavior,
soil dynamics, and the ability to employ both analytical
and empirical tools to arrive at proper facilities design.
At Vibro-Acoustic Consultants, we utilize our experience
obtained through the design and field testing of a large
mega fabs, along
with our strong background
in structural and soil dynamics to optimize each facility
to the site-specific and client-specific conditions
We begin our design at the site selection stage; continue
through concept design, design development, construction
and commissioning of the facility. During our
typical design process, we employ:
models of ambient vibration sources and soil conditions
computer-based structural models to perform finite element vibration analyses
computer-based acoustical models to determine acoustical/noise design
and inspection of the isolation of vibration generating
vibration testing and inspection of the structure once it
measures of the performance of the facility under
Noise is a particular concern for high-end
used in semiconductor manufacturing
and nanotechnology research and development. While the noise environment in most manufacturing
cleanroom settings is designed for human comfort and speech intelligibility, acoustical
disturbances are disruptive for such nanoscale tools as atomic force microscopy (AFM), scanning
probe microscopy (SPM), electron microscopy (EM), and others.
Some electron microscopes are especially sensitive to acoustical noise,
especially high-end SEMs and TEMs.
While these labs often do not require cleanrooms, HVAC and exhaust systems are still
the primary sources of
In addition to design attention to these sources, good
acoustical design of interior absorptive surfaces and isolating wall secions is necessary.
We work as part of architectural / engineer (A/E) teams or directly with
facilities owners to provide full vibration and noise design
of these facilities, from environmental
noise evaluation, vibration and noise monitoring
during construction, tool hook-up vibration design, and
tool pedestal design and testing.
We employ state-of-the-art vibration, noise, and acoustical
techniques and instrumentation to obtain accurate field
data. We have up-to-date knowledge on the next-generation
tools and the trends in their vibration and noise sensitivity
as the technology migration to smaller feature sizes
Please contact us to discuss your particular needs.